EDS / EDX Detector
Definition
Energy-dispersive X-ray spectroscopy (EDS, also called EDX) detector: a silicon-drift detector mounted at a fixed take-off angle that reads characteristic X-rays emitted as the electron beam ionises atoms. Energy resolution at the Mn K-alpha line is about 125 eV. Element range and detection limits depend on detector window, specimen, and acquisition conditions. XRF is a separate technique.
Related terms
- ASTM E1588
- ASTM International standard practice for gunshot residue analysis by scanning electron microscopy with energy-dispersive spectrometry. Defines particle classification (characteristic, consistent-with, indicative), morphology...
- Back-Scattered Electron (BSE)
- High-energy electron from the primary beam that has bounced elastically off a nucleus and exited the sample. BSE yield increases with atomic...
- Environmental SEM (ESEM)
- Variant of conventional SEM that runs the sample chamber at higher pressure (up to several torr of water vapour) instead of the...
- Secondary Electron (SE)
- Low-energy electron (below 50 eV) ejected from the top few nanometres of the sample when the primary beam knocks a loosely bound...
- Sputter Coating
- Vacuum-deposition technique that lays a thin (5 to 15 nm) conductive layer of gold, gold-palladium or carbon onto a non-conductive sample (polymer,...