EDS/EDX
Definition
Energy-dispersive X-ray spectroscopy of emitted X-rays; distinct from XRF excitation.
Related terms
- BSE
- Backscattered electrons, useful for composition and other contrast depending on conditions.
- Charging
- Charge accumulation that can alter imaging, measurement or the specimen.
- GSR Classification
- Assessment of particles using appropriate elemental, morphological and procedural criteria within a stated scope.
- Interaction Volume
- The pear-shaped region of specimen material within which the primary electron beam deposits energy and generates signals. At 20 kV in a...
- SE
- Secondary electrons, commonly providing surface-sensitive imaging information.