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Charging

Definition

Charge accumulation that can alter imaging, measurement or the specimen.

Related terms

BSE
Backscattered electrons, useful for composition and other contrast depending on conditions.
EDS/EDX
Energy-dispersive X-ray spectroscopy of emitted X-rays; distinct from XRF excitation.
GSR Classification
Assessment of particles using appropriate elemental, morphological and procedural criteria within a stated scope.
Interaction Volume
The pear-shaped region of specimen material within which the primary electron beam deposits energy and generates signals. At 20 kV in a...
SE
Secondary electrons, commonly providing surface-sensitive imaging information.

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