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ZAF correction

A software correction applied to raw EDS X-ray intensities to account for atomic number (Z), absorption (A), and fluorescence (F) effects within the interaction volume, producing accurate elemental concentration values from the measured spectra.

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Related terms

ASTM E1588Back-scattered electron (BSE)Characteristic X-rayEnergy-dispersive X-ray spectroscopy (EDS)FIB (Focused Ion Beam)Interaction volumeLead-free GSRSecondary electron (SE)Silicon drift detector (SDD)Sputter coatingUltramicrotome

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