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Silicon drift detector (SDD)

The current standard EDS detector type, using a reverse-biased silicon chip cooled by a Peltier element to achieve high count-rate capability (up to 500,000 counts per second) and energy resolution of approximately 125-135 eV.

Explained in

Electron Microscopy: SEM, TEM and EDS

Related terms

ASTM E1588 Back-scattered electron (BSE)Characteristic X-ray Energy-dispersive X-ray spectroscopy (EDS)FIB (Focused Ion Beam)Interaction volume Lead-free GSR Secondary electron (SE)Sputter coating Ultramicrotome ZAF correction

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